Precision optical microelectronic purification engineering is defined as the removal of dust particles, harmful air, bacteria and other pollutants from the air within a certain space, the temperature, humidity, cleanliness, pressure, air velocity, air distribution, noise, vibration, lighting and static electricity are controlled within a certain range of requirements.
Optical micro-electronic purification engineering is also known as clean room or clean room, at present, it is an indispensable and important facility in semiconductor, precision manufacturing, liquid crystal manufacturing, optical manufacturing, circuit board manufacturing, biochemistry, medicine, food manufacturing and so on. In recent years, due to the innovation and development of technology, the demand for high precision and miniaturization of products has become more urgent. For example, the research and manufacture of VLSI has become an important project in the development of science and technology all over the world, and our company's design concept and construction technology in the industry is in a leading position.
Precision optical micro-electronic purification engineering generally includes: 1, Clean Production Area 2, Clean Auxiliary Room (including personnel purification room, material purification room and part of the Living Room)3, Management Area (including office, duty, management and rest)4, equipment area (including purification air-conditioning system applications, electrical room, high-purity water and gas room, hot and cold equipment room)
The purification principle of precision optical micro-electronic purification engineering air flow → primary purification → air conditioning → medium efficiency purification → fan air supply → duct → high efficiency purification tuyere → blowing into the room → taking away dust and bacteria particles → return air shutter → primary purification repeats the above process, to achieve purification.
The number of air changes of the purification parameters in the precision optical microelectronic purification engineering: 100000 Order ≥15 times; 10000 Order ≥20 times; 1000 order ≥30 times. Pressure Difference: Main Workshop to adjacent rooms ≥5 PA average wind speed: 10 grade, 100 grade 0.3-0.5 m/s; temperature, winter > 16 °c; Summer < 26 °C; Fluctuation ± 2 °C. Temperature 45-65% , GMP powder workshop humidity in 50% or so appropriate, slightly higher humidity in the electronic workshop to avoid static electricity. Noise ≤65dB (a) ; fresh air supply 10%-30% of the total air supply; illumination 300LX.
Precision optical micro-electronic purification engineering structural materials 1. In general, 50mm thick sandwich color steel plate is used to make the wall and roof of purification workshop, which is characterized by beautiful appearance and strong rigidity. ARC Corner, door, window frame and so on are usually made of special alumina profiles. 2. The ground can use epoxy self-flow floor or high-grade wear-resistant plastic floor, have anti-static requirements, can choose anti-static type. 3. The return air duct is made of hot-crossing zinc plate, and is pasted with fire-retardant PF foam plastic plate with good effect of purification and heat preservation. 4. Efficient air supply with stainless steel frame, beautiful clean, perforated mesh plate with baking paint aluminum plate, non-rusty non-stick dust, appropriate clean
Precision optical micro-electronic purification engineering solutions: in the design process of purification engineering, it is necessary to strengthen the analysis and understanding of the design scheme of purification engineering for optical micro-electronic industry, and combined with its specific production process, production processes and other requirements to determine its need for cleanliness, temperature and humidity. In the light of the specific conditions of the project, and also taking into account the economic bearing capacity of the manufacturers, various factors are combined to determine which kind of purification plan to adopt, this can be designed to meet the production and use requirements of Party A, reasonable project cost, economic and practical energy-saving program. 1. Air Handler + chillers + high efficiency air vents -- this is the most traditional design for a clean air conditioning system. The combined air handler contains various functional sections, such as mixing section, primary effect filter section, Surface Cooling section, secondary return air section (or Middle Section) , heating section, humidifying section, medium effect filter section, Fan section, etc. . The cold source is provided by the water chiller. PROS: A. Air Treatment effect is good, because the air after centralized treatment, in the air supply process is less polluted. The air supply temperature, humidity control is more accurate; B. The utility model is suitable for a factory building with a central cold source or a large factory building; C. The cold and heat sources of air-conditioning can be used together or independently with the common air-conditioning system of the workshop. Maintenance frequency is low; e. The noise in the workshop is low. CONS: A. Need to have a complete refrigeration room or set up heat pump unit of the outdoor space. In addition, there is a need for air conditioning room with a air handler, such as a 25000m3h air handler, commonly used profile size of 645018502250 mm. For the old plant renovation project, it is difficult to vacate a 20-30 project; B. High Cost.
FEATURES: A. It is suggested that the fresh air should be mixed with the return air after centralized treatment so as to reduce the cooling load of the surface cooling section. This kind of program can be applied to the clean degree such as 100,10000,10000,10000, etc. . 2. The analysis of design scheme of purification engineering in precision optics and microelectronics industry. Compared with the former scheme, this is a relatively simple air conditioning scheme. The utility model can greatly reduce the area of the machine room, the water-cooling cabinet can be arranged in the smaller machine room or the purification workshop according to the concrete conditions, and the supercharged air-blower cabinet can be arranged in the machine room or suspended in the machine room or in the mezzanine floor. PROS: A. The air treatment effect is better, after the treatment of air in the air supply process is low pollution. The temperature and humidity control effect of air supply can be well controlled. Mainly in the air handler (Pressurized Hood) for control; B. The layout is flexible. With its own cold source; C. Large and small factory buildings, old and new factory buildings are applicable. Maintenance frequency is low; e. The workshop is quiet. CONS: A. We need a small computer lab. Need a cooling tower, Cooling Water pump placement position; B. Air-conditioning units and air-conditioning Treatment Units to centralized layout; C. Cost less. Features: This program can be a primary return air can also be a secondary return air, depending on the size of the workshop, such a program can generally be applied to the cleanliness of a thousand, ten thousand, 100,000 class clean plant.
3, precision optics microelectronics industry purification engineering design scheme analysis of Split Air conditioning cabinet + + FFU air supply port this is the most simple air conditioning scheme. The split air-conditioning cabinet is directly arranged in the workshop, and is surrounded by color steel, and then opens the return air outlet (with initial effect filter) on the color steel plate at the return air outlet of the cabinet. This scheme is suitable for the dust-free workshop which does not require high precision of indoor temperature and humidity. PROS: A. Does not need to occupy the computer room area, the arrangement is very flexible; B. Can meet the cleanliness of the air; C. Lowest cost. Such a clean workshop initial investment of about 400,000; D. Good uniformity of air supply. CONS: A. Poor temperature and humidity control; B. Can meet the cleanliness of the air; C. FFU maintenance frequency is high.
4. Purification engineering design scheme analysis of precision optics and microelectronics industry features of Clean Workshop A, clean degree of clean workshop: The brief process of LCD screen making is: Cleaning → printing orientation film → friction → sealing printing layer scatter spacer → combination → drawing and cutting → LC → injection → sticking polarizer → final inspection of screen making. In this design refers to the end of the process of some dust-free workshop, the cleanliness of the general for the class or class or class 100,000 or class 100. Backlight screen class clean workshop is mainly the stamping workshop, assembly of such products clean workshop, its cleanliness is generally 10 or 10,000 class. B, Indoor Air parameters requirements: (1) temperature and humidity requirements: temperature is generally 24 + 2 °C, relative humidity is 55 + 5% . (2) fresh air is plentiful. Due to the large number of workers in such workshops, the following maximum values can be taken: 10-30% of the total supply air volume of a clean room with non-one-way flow; Ensure that the fresh air volume per person per hour in the room is ≥40m3/h. (3) large air supply volume. In order to meet the cleanroom cleanliness and heat and moisture balance, need a larger air supply, on the 300 square meters workshop, ceiling height of 2.5 meters, if it is 10,000, the supply air volume is 3002.530 = 22500 M3/H (air change times are ≥25 Times/h) ; if it is 100,000, the supply air volume is 3002.520 = 15000 M3/h (air change times are ≥15 times/h)
Analysis of design scheme of cleaning engineering in microelectronics industry for the design of air conditioning in clean rooms of conventional electronic factory buildings, which design scheme should be chosen according to the production process requirements of electronic factory buildings and the economic conditions of Party A, to meet the requirements of the production process as a prerequisite. According to past experience, for high demand can choose combined air handler air conditioning solution; for low demand, but also low initial investment, you can choose the cabinet + FFU. In short, the choice of the specific program depends on the specific circumstances.
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